Our group, under the direction of Professor David Graves, focuses on the fundamentals and applications of weakly to partially ionized gases, or plasmas, to technological problems, primarily in the microelectronics industry.

Studies of Plasma Gas-Phase Physics and Plasma Surface Interactions:

M.D. simulations of plasma-surface chemistry

Plasma diagnostic techniques

High pressure micro-scale glow discharge arrays

Global model plasma simulation methods

1. Radical-enhanced atomic-layer chemical vapor deposition
   

   
   
   

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UPDATE: Sept. 24th -- Congratulations to Monica Titus on passing her qualifying examination!!!

Publications

For more information, please see our research overview.

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